Product Code: ICAL07_M505
Rapid Laser Patterning versus Wet-Etch Lithography for Flat Panel Display Manufacture: A Technical & Commercial Comparison
Jozef Wendland, Powerlase Ltd; West Sussex Great Britain
Matt Henry, Powerlase Ltd; West Sussex Great Britain
Paul Harrison, Powerlase Ltd; West Sussex Great Britain
Duncan Hand, Heriot Watt University; Edinburgh Great Britain
Presented at ICALEO 2007
Rapid Laser Patterning (RLP) of ITO thin films on glass offers a credible industrial alternative to wet-etch lithography for the manufacture of Flat Panel Displays particularly for Plasma Displays. For any disruptive technology it is necessary to compare and contrast it with the existing manufacturing technique so that end users can make an informed decision as to its relative merits both technical and commercial.
Both processes are compared empirically and it is demonstrated that RLP offers benefits in terms of edge resolution, taper and is less prone to residue. Furthermore a commercial cost model is generated based on real capital and operational cost data. This model suggests that RLP can offer cost savings in the order of tens of millions of dollars for a single production line over a three year depreciation period.
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