Product Code: JLA_1_1_26

Authors:
Bruno Bosacchi
AT&T Bell Laboratories ‐ Engineering Research Center, Princeton, New Jersey

We review the resonant ATR spectroscopy as an effective way to enhance the sensitivity of the optical measurements in semiconductor technology. After a short introduction of the basic principles, we consider its application to the non‐destructive characterization of the multilayer structures used in the manufacture of electronics and optoelectronics devices (Resonant ATR technique).