Product Code: ICA12_P155

Optimizing Ultrashort Laser Pulses for High-Precision and High-Performance Micromachining Process
Authors:
Hoon Jeong, Manufacturing System Center, Korea Institute of Industrial Technology (KITECH); Cheonansi South Korea
Dongjoo Lee, Manufacturing System Center, Korea Institute of Industrial Technology (KITECH); Cheonan South Korea
Presented at ICALEO 2012

In recent years, femtosecond laser pulses have been used for micromachining, which cleanly ablate a variety of materials with high precision for a wide range of applications, such as making fine features on metal surfaces, repairing patterns for Flat Panel Device (FPD), removing residues on micro-devices, etc. However, recent research has shown that distortions of the femtosecond pulses used for machining adversely affect micromachining performance. In order to obtain the best resolution and the highest performance in the micromachining process, we optimize femtosecond laser pulses on a sample, using pulse characterization and a four prism pulse compressor. By adjusting the distance between two prisms and the angle of the last prism we can control the temporal chirp and the pulse front tilt continuously.