Product Code: ICA10_M904

Laser Micro Machining of Glass, Ceramics and Metals Utilizing Trepanning Optics
Authors:
David Ashkenasi, Laser- and Medizin-Technologie Berlin Gmbh; Berlin Germany
Tristan Kaszemeikat, Laser- Und Medizin-Technologie Berlin; Berlin Germany
Norbert Mueller, Laser- Und Medizin-Technologie Berlin; Berlin Germany
Hans Joachim Eichler, Technical University of Berlin; Berlin Germany
Gerd Illing, Laser- Und Medizin-Technologie Berlin Gmbh; Berlin Germany
Presented at ICALEO 2010

Laser induced micro-ablation using diode-pumped short pulsed solid-state lasers offers the possibility to machine and structure a whole range of different materials at adequate speed and high precision. To avoid negative thermal and mechanical effects at given laser parameters that obstruct the precision, LMTB has developed new concepts in optical trepanning. The developed systems with rotating optics placed behind the focussing optics allow for a fast distribution of laser pulses and are implemented to process through-holes, pockets and grooves. The presentation outlines the development steps of the LMTB trepanning concepts, pointing out recently acquired laser micro machining results of float glass, ceramic and metal substrates.