Product Code: ICA10_M706

Micromachining of Glassy Carbon Toolsets for Micro Embossing Applications
Authors:
Pranav Chopra, Institute for Manufacturing, University of Cambridge; Cambridge Great Britain
Kun Li, Institute for Manufacturing, University of Cambridge; Cambridge
William O'Neill, Institute for Manufacturing, University of Cambridge; Cambridge Great Britain
Jack Gabzdyl, Spi Laser; Southampton Great Britain
Presented at ICALEO 2010

Glassy carbon materials offer advantages in the application of toolsets for micro embossing due to their particular material properties of high hardness, high operating temperatures and high chemical inertness. Such properties also render them difficult to process. The standard manufacturing approach of high temperature sintering and polishing make micro features almost impossible to obtain for micro embossing applications. This paper presents the general approach of laser micro machining of polished glassy carbon flats using a MOPA based Yb fiber laser. Results presented here show the approach to be suitable for a wide range of micro features that have surface roughness levels comparable with the polished substrates. The process operating window is presented in addition to a range of micro embossing toolsets that have been employed in micro embossing applications.