Product Code: ICA10_M503

Microlens Arrays Fabricated on Polycarbonate Sheets Via Pulsed Laser Maskless Interference Patterning
Authors:
Rui Guo, Woodruff School of Mechanical Engineering, Georgia Institute of Technology; Atlanta GA USA
Dajun Yuan, Woodruff School of Mechanical Engineering, Georgia Institute of Technology; Atlanta GA USA
Suman Das, Woodruff School of Mechanical Engineering, Georgia Institute of Technology; Atlanta GA USA
Presented at ICALEO 2010

: A method is developed to fabricate large areas of microlens arrays on flexible substrates of polycarbonate film via maskless laser interference patterning. Nanosecond pulsed Nd:YAG laser with 266nm wavelength is used to generate two-beam interference pattern. Crossing periodical pattern is fabricated by double exposure by turning the sample 90 degrees. The microlens array period is adjustable from submicron to many microns by changing the interference angles. From Atomic Force Microscope (AFM) and Scanning Electron Microscope (SEM) measurements, representative 3.2µm and 900nm diameter microlens arrays are obtained on the modified area spanning on squre-centimeter scale. Optical property tests show that the microlens array can be used for imaging. Although the experimental results are demonstrated for polycarbonate substrate, the method can be applied to other materials which are suitable for deep-UV laser ablation. The experimental results suggest that our method has the potential for fast and low-cost production of microlens arrays on flexible polymer substrates.