Product Code: ICA10_M206

Microdrilling of Sheet Materials with Femtosecond Laser Pulse Shaped by Computer Generated Hologram
Authors:
Hayato Kawashima, New Glass Forum; Tsukuba Japan
Masahiro Yamaji, New Glass Forum; Tsukuba Japan
Jun'ichi Suzuki, New Glass Forum; Tsukuba Japan
Shuhei Tanaka, New Glass Forum; Tsukuba Japan
Presented at ICALEO 2010

We have developed a three-dimensional (3D) multiprocessing method with femtosecond laser pulses shaped by Computer Generated Hologram (CGH). In this paper, we consider microdrilling of various sheet materials such as glass, polymer and metal, using our method. We design a CGH with long-focal-depth for focusing femtosecond laser pulses. We fabricate microholes approximately 1 μm in diameter at the exit surface through 500 μm fused silica glass sheet using the long-focal-depth CGH. It is very difficult to drill the microholes using only focusing lenses. The drilled through microholes is examined using a scanning electronic microscope (SEM). This work provides a novel microdrilling technique using femtosecond laser processing with CGH.