Product Code: ICA10_M1308

Improving Laser Technologies in Photovoltaics by Refractive Beam Shapers
Authors:
Alexander Laskin, Molecular Technology (MolTech) GmbH; Berlin Germany
Vadim Laskin, Molecular Technology (Moltech) Gmbh; Berlin Germany
Presented at ICALEO 2010

Laser technologies in solar cells production, like P1, P2 and P3 structuring, Vias Drilling, Marking, Edge Isolation, can be improved by applying the beam shaping optics that transforms the intensity distribution of laser beam to flattop, donut-like or other profiles. The flattop profile leads not only to higher quality and stability of such techniques like scribing, drilling, but also increases efficiency of using the laser energy and, hence, increases the manufacturing productivity. Since the final spot size is <100 microns it is advisable to apply the beam shapers intended to create the required intensity distribution by focusing a beam with using a diffraction limited lens. This is a standard task for beam shapers Focal-piShaper which operational principle gives freedom in building various optical systems with using scanning heads, various lenses including F-theta lenses, telecentric lenses. The Focal-piShaper can be easily integrated in existing equipment, so it is possible to upgrade already installed machines.
This paper will describe the principles of operation, design features of the refractive field mapping beam shapers Focal-piShaper. There will be presented some practical optical layouts, examples of beam intensity transformation and effects on material processing in scribing of thin-film cells and other processes.