Product Code: ICAL09_M1001

Electrode Ablation On Piezoelectric Ceramics by ns-Pulsed Laser Ablation For Sensing Applications
Authors:
Stephan Kloss, Renishaw Plc.; Edinburgh Great Britain
Rhodri W.C. Lewis, University of Bath; Bath Great Britain
Andrew Dent, University of Bath; Bath Great Britain
Nick Weston, Renishaw Plc.; Edinburgh Great Britain
Kevyn Jonas, Renishaw Plc.; Wotton-Under-Edge, Gloucestershire Great Britain
Christopher R. Bowen, University of Bath; Bath Great Britain
Duncan P. Hand, Heriot Watt University; Edinburgh Great Britain
Jonathan D. Shephard, Heriot Watt University; Edinburgh Great Britain
Presented at ICALEO 2009

The well-known ability of piezoelectric materials to generate an electric charge over the crystal lattice in the case of applied mechanical stress (in the direct piezoelectric effect) and conversely to change the shape when an electric field is applied (reverse p. eff.) has been used for more than 90 years in many applications such as sensors, power sources, actuators/motors and (ultra-)sound generation. In this paper a novel piezoelectric sensor is presented, in which the resonant behavior of the poled lead zirconate titanate (PZT) ceramic is modified by creating thin-film metal electrodes for poling via laser ablation from the piezo substrate. SEM and X-ray mapping are used to examine the impact of the laser ablation process onto the substrate material. Fabricated prototypes with different electrode designs will be shown and the resonating behaviour discussed. Several potential sensing applications will be presented.