Product Code: ICAL06_M801

Direct Fabrication of Thermosensors by Laser Micro-Cladding Functional Materials
Authors:
Xiaoyan Zeng, Huazhong University of Science and Technology; Wuhan Peoples Republic of China
Xiangyou Li, Huazhong University of Science and Technology; Wuhan Peoples Republic of China
Zhigang Dai, Huazhong University of Science and Technology; Wuhan Peoples Republic of China
Presented at ICALEO 2006

Sensors are very important products for the information society. As one of the most important sensors, thick film thermosensors are developing towards to smaller, higher intergratation and higher precise. Comparing with the thick film thermosensor fabricated by silk screen printing, the laser micro-cladding technique is more flexible for its direct fabrication without mask in advance. Furthermore, the sensors fabricated by this technique may be more precise with better quality. In this presentation, thick film thermosensor is firstly fabricated on 96%wt Al2O3 ceramic substrate successfully by laser micro-cladding thick film paste of the thermosensor. The maximum scanning velocity is 70mm/s. The sensors have excellent definition and narrow width (minimum 60µm) with TCR 2330ppm/, the answering time 2.3s and linearity tolerance <1. Besides, the fabricated thermosensors have excellent repeated properties and stability after heat shock. The performances about the sensors fabricated by the laser micro-cladding technique are characterized. The experimental results demonstrate that the thermosensors fabricated by laser micro-cladding have excellent performances, which are better than those fabricated by the traditional silk screen printing methods.