Product Code: ICAL06_M701

Recent Advances in Laser Micromachining for Semiconductor and Microfluidic Applications (Invited Paper)
Authors:
Andrew Hooper, Electro Scientific Industries; Portland OR USA
Edward Swenson, Electro Scientific Industries; Portland OR USA
Robert Hainsey, Electro Scientific Industries; Portland OR USA
Michael Nashner, Electro Scientific Industries; Portland OR USA
Presented at ICALEO 2006

Recent advances in fiber amplified lasers, modelocked technology, and harmonic conversion not only have enabled improvements in traditional micromachining applications but also have opened the door for laser processing in new areas. This paper will review recent work with UV diode-pumped solid state lasers, picosecond lasers and master oscillator fiber power amplifier systems in processing semiconductor, metal, dielectric and polymer materials for such diverse applications as memory repair, microfluidics, solar cells, and MEMS.