Product Code: ICAL06_M504

A Laser Selective Etching Process for Next-Generation Flexible Display
Authors:
Kwang-Ryul Kim, LG Electronics Inc.; Pyungtaek, Kyunggido South Korea
J. W. Kim, Production Engineering Research Institute, LG Electronics Inc.; Pyungtaek-si South Korea
Kwangyeol Baek, Production Engineering Research Institute, LG Electronics Inc.; Pyungtaek-si South Korea
S.C. Oh, Production Engineering Research Institute, LG Electronics Inc.; Pyungtaek-si South Korea
C.H Cho, Production Engineering Research Institute, LG Electronics Inc.; Pyungtaek-si South Korea
H. S. Kang, Production Engineering Research Institute, LG Electronics Inc.; Pyungtaek-si South Korea
S. K. Hong, Production Engineering Research Institute, LG Electronics Inc.; Pyungtaek-si South Korea
J.H. Son, 2 LG Electronics Institute of Technology, LG Electronics Inc.; Seoul South Korea
S.S. Yoon, LG Electronics Institute of Technology, LG Electronics Inc.; Seoul South Korea
Y.W. Choi, LG Electronics Institute of Technology, LG Electronics Inc.; Seoul South Korea
Presented at ICALEO 2006

A traditional Photo Resist (PR) baking process requires high temperature and it could cause deformation of transparent polymer material which can be used for substrate panel for a flexible display. A laser selective etching process for Flat Panel Display(FPD) patterning has been developed to skip the developing process after the photolithography, and overcome the problem mentioned above. Since the pattern shows a lot of non-repeatable shapes, a synchronized mask and substrate scanning method is applied for the process. A organic material instead of PR is sputtered on the metal layer on the substrate and the pattern on the photomask for a flexible display is projected and clearly etched using a UV laser.

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