Product Code: ICAL06_M102

Fabrication, Characterization and Simulation of Noval 3-D Photonic Bandgap Structures Using Laser Chemical Vapour Deposition
H. Wang, University of Nebraska; Lincoln NE USA
Yongfeng Lu, University of Nebraska-Lincoln; Lincoln NE USA
Z.Y. Yang, University of Nebraska; Lincoln NE USA
Presented at ICALEO 2006

3-D photonic bandgap (PBG) structures were fabricated using laser chemical vapor deposition (LCVD) in combination of self-assembly of silica particles on silicon substrates. The multilayer self-assembly of silica particles were formed on silicon substrates using isothermal heating evaporation approach. A CW Nd:YAG laser (1064 nm wavelength) was used as the energy source in the LCVD process. A silica-silicon shell PBG structure was obtained. By removing silica particles enclosed in the silicon shells using chemical etching by hydrofluoric acid, a novel air-silicon shell PBG structure was produced. This technique is capable of fabricating structures with complete photonic bandgaps, which is predicted by theoretical calculations with the plan-wave method. This might enable us to engineer the position of photonic bandgaps by flexibly varying the silica particle size. Ellipsometry was used to identify specific bandgaps at various crystal directions for both structures. The transmission matrix method was used to simulate the transmission spectra of the structures, which agreed with the experimental results.

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