Product Code: ICAL09_N103

High Throughput Laser Assisted Near-field Nanomanufacturing
Authors:
Heng Pan, Uc-Berkeley; Berkeley CA USA
David Hwang, Uc-Berkeley; Berkeley CA USA
Seung H. Ko, Uc-Berkeley; Berkeley CA USA
Costas Grigoropoulos, Uc-Berkeley; Berkeley CA USA
Presented at ICALEO 2009

Near field nanomanufacturing can break the diffraction limitation and generate features at nanoscale. However, current near field nanomanufacturing suffers from the low throughput and hinders its practical applications. In this paper, we are presenting a new approach of adopting a tip array and generate an array of features with nanoscale resolution. The nanodevices fabricated by this technique will be demonstrated.