Product Code: PIC06_M307
Nanostructured ZnO Thin Films Prepared by Pulsed-laser Deposition
Henry Peng, GE Global Research Center (Shanghai); Shanghai Peoples Republic of China
Peng Li, GE Global Research Center (Shanghai); Shanghai Peoples Republic of China
Presented at PICALO 2006
Zinc oxide is a versatile material with excellent optical, electrical and piezoelectrical properties and has been applied to antireflection coatings, transparent electrodes in solar cells, surface acoustic wave devices, pyroelectric devices, gas sensors, varistors and electro- and photoluminescent devices. Nanostructured ZnO thin films can be achieved by pulsed-laser deposition. Key processing parameters of chamber pressure and substrate temperature have been investigated and correlated with various morphologies of nanostructure. The characterization was made using X-ray diffraction and scanning electron microscope.
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