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Product Code: JLA_18_2_131

S. W. Son
M. K. Lee
K. H. Oh
S. H. Jeong
Department of Mechatronics, Gwangju Institute of Science and Technology, 1 Oryongdong Bukgu, Gwangju, 500-712 Republic of Korea

A fabrication method of titanium microchannels of an aspect ratio up to 16 and channel width of 10–30 μm is developed using laser-assisted thermochemical wet etching. For the fabrication of deep channel, the workpiece was repeatedly etched over the same path with the control of process parameters. The cross-sectional profile of the microchannel varied between a V shape and a U shape, depending largely upon the laser beam power and etchant concentration. Bubble formation characteristics that influence significantly on the surface quality and process stability are investigated. It is demonstrated that high-aspect-ratio metallic microchannels with different cross-sectional profiles and sizes can be fabricated by properly controlling the process parameters.

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