Product Code: JLA_17_1_38


Authors:
Ying-Tung Chen
Department of Mechanical Engineering, Chung Cheng Institute of Technology, Tashi, Taiwan 33508, Republic of China

Kung-Jeng Ma
Department of Mechanical Engineering, Chung Hua University, Hsinchu, Taiwan 30067, Republic of China

Jack G. Zhou
Department of Mechanical Engineering, Drexel University, Philadelphia, Pennsylvania 19104

Ampere A. Tseng
Department of Mechanical and Aerospace Engineering, Center for Solid State Electronics Research, Arizona State University, Tempe, Arizona 85287-6106


An excimer laser has been used for ablation of glass-based substrates for making arrayed microstructures. The arrayed microstructures are fabricated by repetition of a simple-patterned mask associated with substrate movement controlled by an x-y stage synchronizing with laser pulses. The associated ablation efficiency, specifically the impact of changing major laser parameters on the resulting microstructural shapes and morphology, has been studied. Several microstructures have been machined by this repetition technique to demonstrate that the use of a single-slotted mask indeed can be cost effective in prototyping of various glass-based arrayed microstructures. The single and arrayed microstructures developed include microracks, waveguides, microprobes, and microstamps; the specific applications of these microstructures in mechanical, optical and biomedical areas are also discussed. The associated ablation techniques for different application are described and demonstrated. The defocusing effects on forming different vertex shapes in microprobes are specifically illustrated. Finally, recommendations for future efforts and trends are presented.

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