Product Code: ICA11_M803

Novel Method of Pulsed Laser Deposition Using Liquid Flow Target
Authors:
Masahito Katto, Center for Collaborative Research and Community Cooperation, University of Miyazaki; Miyazaki Japan
Masanori Kaku, Department of Electrical and Electronic Engineering, University of Miyazaki; Miyazaki
Shoichi Kubodera, Department of Electrical and Electronic Engineering, University of Miyazaki; Miyazaki
Atushi Yokotani, Department of Electrical and Electronic Engineering, University of Miyazaki; Miyazaki
Presented at ICALEO 2011

We proposed a novel scheme for film deposition based on the pulsed laser deposition. We supply the liquid flow as target in and pulsed laser was irradiated it. Ablated species from the liquid-target was deposited on the substrate. In this method we can always obtain the constant target status and we can keep film quality as good for long time. We are now trying to make a colloidal hydroxyapatite solution for the target.