Product Code: ICAL09_P106

Microstructuring of Various Materials using Femtosecond Laser Pulses
Authors:
Manuel Pfeiffer, University of Applied Sciences Mittweida; Mittweida Germany
Andy Engel, University of Applied Sciences Mittweida; Mittweida Germany
Guenter Reie, University of Applied Sciences Mittweida; Mittweida Germany
Hagen Gruettner, University of Applied Sciences Mittweida; Mittweida Germany
Steffen Weimantel, University of Applied Sciences Mittweida; Mittweida Germany
Presented at ICALEO 2009

New results on three-dimensional micro-structuring of quartz glass as well as tungsten carbide hard metal, copper, brass and titanium using femtosecond laser pulses will be presented. For the investigations, a largely automated high-precision fs-laser micromachining station was used. The fluorine laser system permits material machining using focussing technique, where the average wavelength of the fs-laser system is 775 nm, its maximum pulse energy 1 mJ, the pulse duration 150 fs and the constant pulse repetition rate 1 kHz. The fs-laser beam is focussed onto the sample surface using different objectives.
Based on investigations of the ablation behaviour of the various materials in dependence of the laser processing parameters, which will be presented in the first part of the talk, different 3D-microstructures have been produced in those materials. It will be shown that, due to multiphoton absorption processes, quartz glass can properly be ablated also at this rather low photon energy, if sufficiently high intensities are used. As will be shown, the fs-laser is also suitable for high-precision micromachining of metals. Nearly no heat affected zones next to the laser processed microstructures and, in the case of the sintered hard metal, no decomposition or segregation due to the fs-laser action was observed. In the second part of the presentation, complex 3D microstructures with a variety of geometries, such as half spheres and pyramids, and resolutions down to a few micrometers showing smooth side walls as well as steep wall angles and the parameters which were found to be optimum for the microstructuring of each material will be presented. Finally, it will be shown that fs-laser microstructuring of quartz glass can be used for the production of projection masks for excimer laser microstructuring.

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