Product Code: ICAL09_M804

Laser Micro Fabrication: Material Removing or Adding
Authors:
Jimin Chen, Beijing University of Technology; Chaoyang, Beijing Peoples Republic of China
Shibing Liu, Institute of Laser Eng.; Beijing Peoples Republic of China
Liu Furong, Institute of Laser Engineering, Beijing University of Technology; -
Jun Shao, Institute of Laser Engineering; Beijing Peoples Republic of China
Presented at ICALEO 2009

Laser microfabrication has found wide application in industry. Currently many micro processing technologies have been developed. Laser ablation for example is based on the top-down philosophy which the material is gradually removed. UV lasers or ultrafast lasers are used to obtain the tiny focused point so that the smaller amount of material could be wiped off. LCVD (Laser chemical vapor deposition) could fabricate micro part by adding materials layer by layer. The novel laser microfabrication LVMS (Laser Vapor Micro Sintering) was developed by combination of material removing and adding. LVMS makes use of high energy intensity to vapor the powder then sinter the powder around the beam to form a thin wall. It shows the great potential advantage to fabricate micro parts.