Product Code: ICAL08_M208

Analysis of Influence Factors on Microscale Laser Shock Processing in Fem Simulation
Authors:
Liangcai Xiong, Huazhong University of Science & Technology; Wuhan Peoples Republic of China
Zhigang Che, Huazhong University of Science & Technology; Wuhan Peoples Republic of China
Tielin Shi, Huazhong University of Science & Technology; Wuhan Peoples Republic of China
Rui Peng, Huazhong University of Science & Technology; Wuhan Peoples Republic of China
Presented at ICALEO 2008

Microscale Laser Shock Processing (μLSP) can generate plastic deformation and compressive residual stresses in Micro Electromechanical Systems (MEMS) components through laser-induced plasma, for improving fatigue, wearing or stress corrosion cracking resistance. For the first time, the two-step quasi-static loading and unloading processes and the infinite elements are introduced for the numerical calculation of μLSP, which are compared with the results of using pure finite elements calculation. Also the relaxation time is discussed for multiple impacts. Different values of various parameters, including laser beam radiuses, laser intensities and impact times, are used in FEM calculations for μLSP, and the influence of changed parameters on residual stress and plastic deformation is investigated in this paper. The affected extent of plastic deformation is achieved for different radiuses of laser beam, especially the results for R=6 μm have good agreement with experimental ones of Zhang et al. The plastic deformation of target material under different parameters provides theoretical reference for the thickness of coating layer as the MEMS components are treated using μLSP.

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