Product Code: ICAL08_M1104

Short-Pulse Lasers with the High Power and Repetition Rate for Microfabrication
Authors:
Mikhail Grishin, Ekspla Uab; Vilnius Lithuania
Saulius Jacinavicius, Ekspla Uab; Vilnius Lithuania
Gediminas Raciukaitis, Institute of Physics; Vilnius Lithuania
Giedrius Andriukaitis, Ekspla Uab; Vilnius Lithuania
Marijus Brikas, Institute of Physics; Vilnius Lithuania
Presented at ICALEO 2008

Employment of short-pulse lasers in microfabrication opens a lot of opportunities in tailoring and shaping variety of materials. The main drawback in wide use of the laser technology in micro- and nanoscale today is the low fabrication speed. An increase in the pulse repetition rate is a way to reach the desire efficiency. New high-power and high repetition-rate lasers based on the diode-pumped Nd:YVO4 crystals with pulse duration in picosecond and nanosecond time range were developed and applied in processing of different engineering materials. Pulsing up to 100 kHz allowed flexible machining of bulky and thin-film materials. Results of microfabrication and their relation with laser parameters will be presented.