Product Code: ICAL07_N305

Parametrical Study of Photonic Bandgap Structures Fabricated using Laser-assisted Chemical Vapor Deposition
H. Wang, University of Nebraska; Lincoln NE USA
Yongfeng Lu, University of Nebraska - Lincoln; Lincoln NE USA
Z.Y. Yang, Univ of Nebraska; Lincoln NE USA
Presented at ICALEO 2007

Laser-assisted chemical vapor deposition (LCVD) was used to fabricate 3-D photonic bandgap (PBG) structures in combination with 3-D self-assembly of silica particles. Multilayer self-assembly of silica particles was formed on silicon substrates using the isothermal heating evaporation approach. A continuous wave (CW) CO2 laser (10.6 µm wavelength) was used as the energy source in the LCVD process. A silica-core-silicon-shell PBG structure was obtained. By removing silica particles enclosed in the silicon shells using chemical etching by hydrofluoric (HF) acid, an air-cavity-silicon-shell PBG structure was produced. This technique is capable of fabricating structures with various PBGs by obtaining different silicon shell thickness with different LCVD parameters. This might enable us to engineer the position and width of PBGs by flexibly controlling the core-shell geometry. In this study, a series of PBG structures with designed PBGs were obtained with different experimental conditions. Spectroscopic ellipsometer was used to identify specific PBGs. The plain wave expansion and transmission matrix methods were used to simulate the transmission spectra of the structures, which agreed with the experimental results.

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