Product Code: ICAL07_M902

Investigation on Laser Micro Ablation of Steel using Ps-Ir Pulse Bursts
Arnold Gillner, Fraunhofer Institut für Lasertechnik; Aachen Germany
Claudia Hartmann, Fraunhofer Institut für Lasertechnik; Aachen Germany
Presented at ICALEO 2007

Laser micro structuring is used for many applications in areas like electronics, sensor systems, medicine but also in the tooling industry. For the establishment of the laser ablation technique in these industries a fast, precise and reproducible process is needed.
Today for precise laser ablation single nanosecond pulses with time spacings between pulses in the range of 10 µs are used. Ablation rates between 0.1 and 1 mm³/min are achieved with depth accuracies of 1-2 µm. Recent investigations using ps-lasers showed even higher investigations, but lower ablation rate. To improve speed in laser micro ablation of metals multi pulses or pulse bursts have been used instead of single pulses. The aim is to improve the efficiency of laser beam micro ablation by increasing the ablation rate and quality, e.g. decreasing the melt at the same time. For the improvement of the multipulse laser ablation a ps laser system with a pulse duration of 12 ps and a repetition rate up to 500 kHz was used. The used bursts consisted of one to three pulses with interpulse separations between 20 ns and 5 µs and various energies per pulse. The ablation rate and surface roughness of the ablation with single- and multi pulses at same energy were compared., The results show, that with ps-multipulses the ablation rate can be increased by at least 30 % compared to single pulse ablation at the same average laser power. Strong interdepences in repetition rate, interpulse separation and achieved roughness have been determined, when using very short distances between the pulses in the range of 200 ns. For the comparison of multipulse and single pulse ablation WIM and SEM photography of the topology of the irradiated area have been investigated.

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