Product Code: ICAL07_M502

Fabrication of Micro-Heaters by Laser Micro Cladding and Micro-Pen Direct Writing
Authors:
Xiangyou Li, Huazhong University of Science and Technology; Wuhan,Hubei Peoples Republic of China
Qainwu Hu, Huazhong University of Science & Technology; Wuhan Peoples Republic of China
Xiaoyan Zeng, Huazhong University of Science and Technology; wuhan,Hubei Peoples Republic of China
Shaofei Wang, Huazhong University of Science & Technology; Wuhan Peoples Republic of China
Zhixiang Cai, Huazhong University of Science & Technology; Wuhan Peoples Republic of China
Presented at ICALEO 2007

Micro-heaters have been applied in a lot of fields such as biology, iatrology, medicine, electronics etc. Different methods can be used to fabricate the micro heaters, including the thick film technique and the photolithography. However, the fabrication technique is complex and highly cost, which limited the developments of micro-heaters in many occasions. In this presentation, a new process, which was based on the hybrid of laser micro cladding and micro-pen direct writing technologies, was introduced to fabricate the microheaters. Compared with the traditional fabrication techniques, this technique is more flexible for its direct fabrication without mask in advance and. more precise with better quality. The fabrication process was described in detail, and laser and micro-pen parameters that affected the heaters quality have been studied systematically. As an application example, a 41 temperature controller array with micro-heaters has been designed and fabricated by this method. Finally, the performances of the controllers were calculated and tested, which showed that the temperature could be controlled by different process parameters.