Product Code: ICAL06_M401

Industrial Applications of Laser Micro/Nano Material Processing
Authors:
Wenwu Zhang, GE Global Research; Schenectady NY USA
Long Que, GE GRC; Schenectady NY USA
Magdi Azer, GE GRC; Schenectady NY USA
Marshall Jone, GE GRC; Schenectady NY USA
Pamela Benicewicz, GE GRC; Schenectady NY USA
Presented at ICALEO 2006

As a precision and high energy density tool, lasers are being widely used in micro- and nano-scale material processing, such as micro-channel fabrication, micro- hole drilling, embedded micro-fluidics structure direct writing, precision slicing of materials, micro-milling of 3D structures, 3D micro-deposition, and laser assisted selective chemical etching, etc. This paper reviews the industrial applications of these processes, followed by the discussion of processing challenges.