• ICALEO 2007 Paper #M104 (Precise Patterning of Thin Films with Picosecond Fiber Laser)

    Precise Patterning of Thin Films with Picosecond Fiber Laser
    Authors:
    Jari Sillanpää, Corelase; Tampere Finland
    Kalle Klä-Jarkko, Corelase; Tampere Finland
    Harry Asonen, Corelase; Tampere Finland
    Presented at ICALEO 2007

    During the last few years fiber lasers have become the hottest topic in material processing applications. In macromachining applications they have been able to take market share from conventional lamp pumped YAG-lasers while also enabling totally new applications that so far have not been in the reach of conventional laser tools. Micro manufacturing processes are the fastest growing applications for lasers due to the dynamic consumer electronics mar...

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  • ICALEO 2007 Paper #M105 (Selective Femtosecond Laser Micro-structuring of Photoresists and TCO)

    Selective Femtosecond Laser Micro-structuring of Photoresists and TCO
    Authors:
    Sandra Zoppel, Vorarlberg University of Applied Sciences; Dornbirn Austria
    Stefan Partel, Vorarlberg Univ. of Applied Sciences; Dornbirn Austria
    Georg A. Reider, Vienna Univ. of Technology; Vienn Austria
    Max Lederer, HighQ Laser; Hohenems Austria
    Pavlina Choleva, Vorarlberg Univ. of Applied Sciences; Dornbirn Austria
    Presented at ICALEO 2007

    We present recent results on selective laser ablation of thick photoresists (AZ-types) and TCO (transparent conductive oxide) layers from dielectric substrates. The well defined threshold for the ablation with ultrashort laser p...

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  • ICALEO 2007 Paper #M1101 (High Quality Laser Micromachining of Silicon: A Crystallographic Comparison of Process Results Achieved with State-of-the-Art Tripled Nd:YAG and IR Lasers)

    High Quality Laser Micromachining of Silicon: A Crystallographic Comparison of Process Results Achieved with State-of-the-Art Tripled Nd:YAG and IR Lasers
    Authors:
    Claudio Ferrari, Instituto IMEM CNR; Parma Italy
    Lucia Nasi, Instituto IMEM CNR; Parma Italy
    Werner Wiechmann, JDSU Corporation; San Jose CA USA
    Pellegrino Sergio, LaserPoint sri; Vimodrone Italy
    Presented at ICALEO 2007

    The ability to cut, scribe, and drill holes and slots in Silicon material is of great interest for many applications in the microelectronics and semiconductor industry. We investigated the use of a Q-switched frequency-tripled Nd:YAG laser for rapid micromachining of Silicon an...

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  • ICALEO 2007 Paper #M1103 (Demonstrated Fossil-Fuel-Free Energy Cycle using Magnesium and Laser (Invited Paper - 40 Minute Presentation))

    Demonstrated Fossil-Fuel-Free Energy Cycle using Magnesium and Laser (Invited Paper - 40 Minute Presentation)
    Authors:
    Kunio Yoshida, Tokyo Institute of Technology; Tokyo Japan
    Takashi Yabe, Tokyo Institute of Technology ; Tokyo Japan
    Shigeaki Uchida, Tokyo Institute of Technology; Tokyo Japan
    Presented at ICALEO 2007

    There is no doubt that we need an energy cycle free of fossil fuels that otherwise emit greenhouse gases causing global warming. Although solar energy is the ultimate renewable energy source, sunlight is available only in the clear daytime and hence it cannot be an alternative to thermal power stations unless effective and large power storage systems a...

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  • ICALEO 2007 Paper #M1104 (Dimensional Accuracy Optimization of the Laser Milling Process)

    Dimensional Accuracy Optimization of the Laser Milling Process
    Authors:
    Antonio Domenico Ludovico, Politecnico di Bari; Bari Italy
    Carmela Deramo, Politecnico Di Bari; Bari Italy
    Sabina Luisa Campanelli, Politecnico Di Bari; Bari Italy
    Presented at ICALEO 2007

    Laser micromachining provides a new method of producing parts in a wide range of materials directly from CAD data. Particularly, in laser milling technology the material is removed by a laser beam through the layer by layer ablation mechanism.
    The aim of this paper was to determine the process capability of the laser micro-milling process, optimising the surface finish and at the same time keeping an high mater...

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  • ICALEO 2007 Paper #M1106 (Optical Trapping for Engineering Manufacture)

    Optical Trapping for Engineering Manufacture
    Authors:
    Stuart Edwardson, The University of Liverpool; Liverpool Great Britain
    Martin Sharp, The University of Liverpool; Liverpool Great Britain
    Walter Perrie, The University of Liverpool; Liverpool Great Britain
    Geoff Dearden, The University of Liverpool; Liverpool Great Britain
    David Whitehead, The University of Manchester; Manchester Great Britain
    Z B Wang, The University of Manchester; Manchester Great Britain
    Philip Crouse, The University of Manchester; Manchester Great Britain
    Z Lui, The University of Manchester; Manchetser Great Britain
    Ken G. Watkins, The...

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  • ICALEO 2007 Paper #M1107 (A Novel Laser Technique for Patterning Black Matrix in LCD Manufacture)

    A Novel Laser Technique for Patterning Black Matrix in LCD Manufacture
    Authors:
    Jozef Wendland, Powerlase Limited; Crawley Great Britain
    Paul Harrison, Powerlase Limited; Crawley Great Britain
    Matt Henry, Powerlase Limited; West Sussex Great Britain
    Presented at ICALEO 2007

    Liquid Crystal Displays (LCDs) represent the most widely manufactured form of Flat Panel Display (FPD) in the world today. This market is extremely price sensitive and so competition is fierce. In an attempt to reduce costs, manufacturers are always interested in new technology to gain a lead on their competition. In recent years laser use has been increasing in the manufacture of FPDs most nota...

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  • ICALEO 2007 Paper #M1201 (EUV and Debris Characteristics of a Laser-Produced Tin Plasma using a Colloidal Tin Dioxide Jet Target)

    EUV and Debris Characteristics of a Laser-Produced Tin Plasma using a Colloidal Tin Dioxide Jet Target
    Authors:
    Masahito Katto, University of Miyazaki; Miyazaki Japan
    Masanori Kaku, University of Miyazaki; Miyazaki Japan
    Shoichi Kubodera, University of Miyazaki; Miyazaki Japan
    Presented at ICALEO 2007

    Characteristics of emitted particles as well as EUV emissions from a laser-produced tin plasma using a colloidal tin dioxide nano-particle jet target were investigated as a possible EUV lithography light source. By using double nano-second YAG laser pulses with an optimum delay of 100 ns, the EUV conversion efficiency of 1.2% at 13.5 nm was observed. The energy and streng...

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  • ICALEO 2007 Paper #M1202 (Generation of Intense Vacuum Ultraviolet Radiations for Advanced Materials Processing)

    Generation of Intense Vacuum Ultraviolet Radiations for Advanced Materials Processing
    Authors:
    Atushi Yokotani, University of Miyazaki; Miyazaki Japan
    Masahito Katto, University of Miyazaki; Miyazaki Japan
    Shoichi Kubodera, University of Miyazaki; Miyazaki Japan
    Masanori Kaku, University of Miyazaki; Miyazaki Japan
    Akira Hosotani, University of Miyazaki; Miyazaki Japan
    Noriaki Miyanaga, ILE, Osaka University; Suita Japan
    Kunioki Mima, ILE, Osaka University; Suita Japan
    Presented at ICALEO 2007

    We have been developing high intense vacuum ultraviolet (VUV) radiations for the advanced applications such as micro and preci...

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  • ICALEO 2007 Paper #M1203 (Development of a 53-W 343-nm UV Laser for Next Generation Material Processing)

    Development of a 53-W 343-nm UV Laser for Next Generation Material Processing
    Authors:
    Santanu Basu, Sparkle Optics Corporation; Rolling Hills Estates CA USA
    Presented at ICALEO 2007

    Drilling of small diameter holes ( 2 mm) industrial materials require high peak power lasers of single-mode beam quality and at a wavelength that is absorbed by the material. The number of holes drilled per second or the processing throughput increases linearly with the laser average power. In this paper, we will present the results of a rotary disk laser, which is a completely new type of pulsed solid state laser system that produces the ideal combination of high peak power, high average pow...

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